Research on multi-parameter controlled 2D and 3D interferometric fields based on 4+1 beam holographic lithography

Multi-beam holographic lithography serves as a prevalent technique for fabricating precision periodic nanostructures, finding extensive application across optical and photonic domains. This paper delves into how multi-laser beam interference constructs 3D photonic crystal structures featuring customizable lattice designs. We establish the mathematical model for the 4+1 beam interference light field under multi-parameter modulation, analyzing the impact of initial phase, incidence angle, azimuthal angle, polarization angle, and polarization state combinations on the resulting pattern. we conducted an in-depth investigation into the control mechanisms of wave vector, polarization state, and initial phase on the intensity distribution of the interference field. This decoupled control mechanism confirms that the wave vector determines periodicity (via the incident angle), the polarization control unit governs morphology, while the initial phase is solely used for spatial translation. Furthermore, after eliminating the effects of dynamic phase noise and environmental noise, this stable configuration enables the design and fabrication of simple tetragonal, cubic, and hexagonal lattice structures. By simply adjusting the beam incidence angle, lattice compression and elongation along a single direction can be achieved for both hexagonal and tetragonal structures.