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Surface modification on GaAs by in-situ pulsed UV laser

  • Changsi Peng
    ,
  • Xiaoxiang Guo
    ,
  • Dayun Huo
    ,
  • Wei Zhang
    ,
  • Chao Xu
  • Soochow University
Research Output:
Chapter in Book/Report/Conference proceeding
Conference contribution
 Peer-review

Abstract

A single-beam of UV pulse laser (355nm/10ns) was used to irradiate the as-grown GaAs (100) surface in-situ in molecular beam epitaxy with pulse numbers from 1 to 6 at laser intensity of 52.5 mJ/cm2/pulse. It was observed that the irradiated GaAs surface morphology depended strongly on the pulse number. For single pulse irradiation, small nano-dots (NDs) with high density were produced on the surface. The size of NDs increased and nano-rings (NRs) were observed with the increasing of pulse numbers. The surface was completely dominated by NRs at 6 pulses of laser irradiating. Arsenic atoms were selectively desorbed away from GaAs surface by laser irradiation leaving plenty of naked Ga-atoms to form small metal-dots of Gallium. Ga-rich NDs transferred to Ga droplets with the increased number of the laser pulses. NRs formed just as the traditional droplet-epitaxy process when the droplet size grew up to a critical size. Nano-drill process played an important role in the process. This research was supposed to provide a novel and promising solution for more controllable nano-fabrication of various semiconductor materials of MBE growing, including but not limited to GaAs reported here.

Publication Information

Output type

Research Output:
Chapter in Book/Report/Conference proceeding
Conference contribution
 Peer-review

Host publication Subtitle

Proceedings Volume 9686

Original language

English

Publication milestones

  • Published - 31/12/2016

Publication status

Published - 31/12/2016

Volume

9686

Publisher

SPIE, United States

Publication IDs

  • handle.net: 10547/624154
  • Scopus: 84999816211

Host publication title

8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices

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Related Event

Title

Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016)

Description

Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016) (Suzhou)

Event type

Conference

Date

31/12/2016

Location

Suzhou