Laser interference lithography: a method for the fabrication of controlled periodic structures

Ri Liu
,
Liang Cao
,
Dongdong Liu
,
Lu Wang
,
Sadaf Saeed
,
Zuobin Wang

Changchun University of Science and Technology

Research Output:

Contribution to journal

Review article

Peer-review

Open access

Abstract

A microstructure determines macro functionality. A controlled periodic structure gives the surface specific functions such as controlled structural color, wettability, anti-icing/frosting, friction reduction, and hardness enhancement. Currently, there are a variety of controllable periodic structures that can be produced. Laser interference lithography (LIL) is a technique that allows for the simple, flexible, and rapid fabrication of high-resolution periodic structures over large areas without the use of masks. Different interference conditions can produce a wide range of light fields. When an LIL system is used to expose the substrate, a variety of periodic textured structures, such as periodic nanoparticles, dot arrays, hole arrays, and stripes, can be produced. The LIL technique can be used not only on flat substrates, but also on curved or partially curved substrates, taking advantage of the large depth of focus. This paper reviews the principles of LIL and discusses how the parameters, such as spatial angle, angle of incidence, wavelength, and polarization state, affect the interference light field. Applications of LIL for functional surface fabrication, such as anti-reflection, controlled structural color, surface-enhanced Raman scattering (SERS), friction reduction, superhydrophobicity, and biocellular modulation, are also presented. Finally, we present some of the challenges and problems in LIL and its applications.

Publication Information

Output type

Research Output:

Contribution to journal

Review article

Peer-review

Original language

English

Article number

1818

Journal (Volume, Issue Number)

Nanomaterials (Volume 13, Issue 12)

Publication milestones

Accepted/In press - 05/06/2023
Published - 07/06/2023

Publication status

Published - 07/06/2023

Publication IDs

handle.net: 10547/625917
Scopus: 85163991691
PubMed: 37368248

Access to documents

10.3390/nano13121818

final published version

Final published version, 12.52 MB

License:CC BY

https://www.mdpi.com/2079-4991/13/12/1818

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