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Fast Fourier transport analysis of surface structures fabricated by laser interference lithography

  • Mengnan Liu
    ,
  • Litong Dong
    ,
  • Ziang Zhang
    ,
  • Li Li
    ,
  • Lu Wang
    ,
  • Zhengxun Song
  • Changchun University of Science and Technology
Research Output:
Contribution to journal
Article
 Peer-review

Open access

Abstract

This paper presents an FFT (fast Fourier transform) analytical method for the study of surface structures fabricated by laser interference lithography (LIL). In the work, the FFT analytical method combined with Gaussian fitting is used to determine the periods and pattern distributions of surface structures from frequency spectra. For LIL, the processing parameters of incident and azimuth angles can be obtained corresponding to the period and pattern distribution. This work facilitates the detection of micro- and nano-structures, the analysis of pattern distribution in engineering, and the processing error analysis of LIL.

Publication Information

Output type

Research Output:
Contribution to journal
Article
 Peer-review

Original language

English

Pages from-to (Number of pages)

Pages 096503

Journal (Volume, Issue Number)

Applied Physics Express (Volume 12, Issue 9)

Publication milestones

  • Accepted/In press - 01/08/2019
  • Published - 14/08/2019

Publication status

Published - 14/08/2019

ISSN

1882-0778

Publication IDs

  • handle.net: 10547/623561
  • Scopus: 85072938338

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