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Fabrication of hierarchical moth-eye structures with durable superhydrophobic property for ultrabroadband visual and mid-infrared applications

  • Litong Dong
    ,
  • Ziang Zhang
    ,
  • Lu Wang
    ,
  • Zhankun Weng
    ,
  • Mingzhao Ouyang
    ,
  • Yuegang Fu
  • Changchun University of Science and Technology
    ,
  • CAS - National Astronomical Observatories
Research Output: Contribution to journal Article Peer-review

Open access

Abstract

Multifunctional antireflective coatings have practical applications as important optical components in many fields, particularly for optical devices and imaging systems. However, a good antireflection application in the visible region is often unsatisfactory for mid-infrared devices, and the difficulty in obtaining multiple capabilities simultaneously is one of the main factors limiting their applications. In this work, hierarchical moth-eye structures with superhydrophobicity were fabricated via inductively coupled plasma reactive ion etching (ICP-RIE) using nanodisk-array masks, which were formed by three-beam laser interference lithography (LIL), for improving the ultra-broadband optical properties. The uniform antireflection efficiency, which was close to 1% reflectivity covering over the visible and mid-infrared wavelength range, was exhibited by the moth-eye structures with high-quality pillar arrays. Additionally, irregular nanostructures were tailored onto the top of the pillars to generate hierarchical moth-eye structures for simultaneously obtaining both the superhydrophobic and anticorrosive properties. The fabricated antireflective structures, with the features of self-cleaning and durability, have the advantage of being for long-term use in harsh environments.

Publication Information

Output type

Research Output: Contribution to journal Article Peer-review

Original language

English

Pages from-to (Number of pages)

Pages 6706-6712

Journal (Volume, Issue Number)

Applied Optics (Volume 58, Issue 24)

Publication milestones

  • Accepted/In press - 27/05/2019
  • Published - 20/08/2019

Publication status

Published - 20/08/2019

ISSN

1559-128X

External Publication IDs

  • handle.net: 10547/623427
  • Scopus: 85071053773

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