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Fabrication of GaAs quantum rings by in-situ laser irradiation

  • Gaojun Zhang
    ,
  • Biao Geng
    ,
  • Zequn Zhu
    ,
  • Zhaoxiang Han
    ,
  • Lingsu Cheng
    ,
  • Maoyun Ren
Research Output: Chapter in Book/Report/Conference proceeding Conference contribution Peer-review

Abstract

In this work, after depositing a GaAs buffer layer (approx. 200nm) via molecular beam epitaxy, we subjected the GaAs substrate to in-situ irradiation by 15 laser pulses (pulse duration ∼10ns) with varying single-pulsed energies of 10mJ, 15mJ, 20mJ, and 30mJ, corresponding to samples A-D. For sample A, quantum rings with a density of 3.75×108/cm2 are observed, of which the average height and width are 1.4nm and 22.2nm, respectively. For sample B, the density, average height and width are 5×108/cm2, 2.5nm and 69.1nm. With an increase in laser energy, the density and size of sample C and D have increased to 7×108/cm2-3.6nm (height)-78.5nm (width) and 1×109/cm2-5.2nm (height)-86.1nm (width) respectively. Obviously, this novel technology that the GaAs quantum rings can be fabricated in-situ through multi-pulsed laser irradiation whilst the size and density of the quantum rings can be effectively adjusted by varying the laser energy would have significant applications in all types of semiconductor devices based on quantum rings in the future.

Publication Information

Output type

Research Output: Chapter in Book/Report/Conference proceeding Conference contribution Peer-review

Original language

English

Article number

131044J

Publication milestones

  • Published - 18/03/2024

Publication status

Published - 18/03/2024

Volume

13104

Publisher

SPIE, United States

Publication series

  • Publication series name: Proceedings of SPIE - The International Society for Optical Engineering
    ISSN (Print): 0277-786X
    ISSN (Electronic): 1996-756X
    Volume: 13104

ISBN (Print)

9781510677661

ISBN (Electronic)

9781510677661

External Publication IDs

  • handle.net: 10547/626858
  • Scopus: 85191979437

Host publication title

Advanced Fiber Laser Conference, AFL 2023

Host publication editors

  • Pu Zhou

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