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Direct modification of silicon surface by nanosecond laser interference lithography

  • Dapeng Wang
    ,
  • Zuobin Wang
    ,
  • Ziang Zhang
    ,
  • Yong Yue
    ,
  • Dayou Li
    ,
  • Carsten Maple
  • Changchun University of Science and Technology
Research Output: Contribution to journal Article Peer-review

Abstract

Periodic and quasi-periodic structures on silicon surface have numerous significant applications in photoelectronics and surface engineering. A number of technologies have been developed to fabricate the structures in various research fields. In this work, we take the strategy of direct nanosecond laser interference lithography technology, and focus on the silicon material to create different well-defined surface structures based on theoretical analysis of the formation of laser interference patterns. Two, three and four-beam laser interference systems were set up to fabricate the grating, regular triangle and square structures on silicon surfaces, respectively. From the AFM micrographs, the critical features of structures have a dependence on laser fluences. For a relative low laser fluence, grating and dot structures formed with bumps due to the Marangoni Effect. With the increase of laser fluences, melt and evaporation behaviors can be responsible for the laser modification. By properly selecting the process parameters, well-defined grating and dot structures can been achieved. It can be demonstrated that direct laser interference lithography is a facile and efficient technology with the advantage of a single process procedure over macroscale areas for the fabrication of micro and nano structures.

Publication Information

Output type

Research Output: Contribution to journal Article Peer-review

Original language

English

Journal (Volume, Issue Number)

Applied Surface Science

Publication milestones

  • Published - 01/01/2013

Publication status

Published - 01/01/2013

ISSN

0169-4332

External Publication IDs

  • handle.net: 10547/336092
  • Scopus: 84880948571

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