Tunable electrochemical oscillation and regular 3D nanopore arrays of InP

Tunable potential oscillations are obtained by electrochemical etching of n-InP (100) in the 3MNaCl solution using the chronoptentiometry with current ramp. The regular 3D nanopore arrays are formed with the change of the current density from 320 to 260 mA · cm-2 at the scan rate 0.72 - 0.80 mA · cm-2 · s-1. The results showed that the current density ranges and scan rate have the effect on the E-t curves and the pore's morphology. The scan rate can regulate not only on the charge consumed per period but also on the amplitude of potential oscillation, and shown that the charge per period and the amplitude can be tuned when proper electrochemical parameters are selected. Furthermore, the pore's morphology will change from the regular structure to irregular with the increasing of the scan rate. In addition, the relation has also been discussed between the E-t curves and the pore's morphology.