The study of nano-structure on in-situ UV laser irradiating GaAs(001) substrate

Changsi Peng; Linyun Yang; Lili Miao; Xinning Yang

doi:10.1117/12.2500785.short?SSO=1

The study of nano-structure on in-situ UV laser irradiating GaAs(001) substrate

Changsi Peng
, Linyun Yang
, Lili Miao
, Xinning Yang

Institute for Research in Applicable Computing (IRAC)

Soochow University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

The AFM study of a series of novel nano-structure on in-situ laser irradiating GaAs(001) substrate in molecular beam epitaxy was presented. Nano-hole, nano-island and nano-ring(Chinese ancient copper coin shape) were observed after laser irradiating. The desorption of Gallium on GaAs surface varies according to different power energy and pulse numbers, leading to the formation of nano-holes, nano-islands and nano-rings. It is speculated that these nanostructures are galliumrich through the change of the RHEED stripe. What’s more, the desorption of defectless GaAs sub-monolayer was discovered, and matched dynamic evolution model (self-drilling effect dominated by Ga atom) was presented. The dependence of the temperature on the surface of the substrate with time was studied after laser irradiating according to the heat conduction equation. The drastic temperature changes caused non-thermodynamic equilibrium process which makes these morphologies.

Original language	English
Title of host publication	Proceedings Volume 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018)
Publisher	SPIE
DOIs	https://doi.org/10.1117/12.2500785.short?SSO=1
Publication status	Published - 31 Dec 2018
Event	SPIE 10827, Sixth International Conference on Optical and Photonic Engineering - Duration: 31 Dec 2018 → …

Conference

Conference	SPIE 10827, Sixth International Conference on Optical and Photonic Engineering
Period	31/12/18 → …
Other	SPIE 10827, Sixth International Conference on Optical and Photonic Engineering

Keywords

in situ laser irradiation

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https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10827/1082729/The-study-of-nano-structure-on-in-situ-UV-laser/10.1117/12.2500785.short%3FSSO%3D1

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@inproceedings{34a0c4219c234f0393861e6bcf29276d,

title = "The study of nano-structure on in-situ UV laser irradiating GaAs(001) substrate",

abstract = "The AFM study of a series of novel nano-structure on in-situ laser irradiating GaAs(001) substrate in molecular beam epitaxy was presented. Nano-hole, nano-island and nano-ring(Chinese ancient copper coin shape) were observed after laser irradiating. The desorption of Gallium on GaAs surface varies according to different power energy and pulse numbers, leading to the formation of nano-holes, nano-islands and nano-rings. It is speculated that these nanostructures are galliumrich through the change of the RHEED stripe. What{\textquoteright}s more, the desorption of defectless GaAs sub-monolayer was discovered, and matched dynamic evolution model (self-drilling effect dominated by Ga atom) was presented. The dependence of the temperature on the surface of the substrate with time was studied after laser irradiating according to the heat conduction equation. The drastic temperature changes caused non-thermodynamic equilibrium process which makes these morphologies.",

keywords = "in situ laser irradiation",

author = "Changsi Peng and Linyun Yang and Lili Miao and Xinning Yang",

year = "2018",

month = dec,

day = "31",

doi = "10.1117/12.2500785.short?SSO=1",

language = "English",

booktitle = "Proceedings Volume 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018)",

publisher = "SPIE",

address = "United States",

note = "SPIE 10827, Sixth International Conference on Optical and Photonic Engineering ; Conference date: 31-12-2018",

}

Peng, C, Yang, L, Miao, L & Yang, X 2018, The study of nano-structure on in-situ UV laser irradiating GaAs(001) substrate. in Proceedings Volume 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018). SPIE, SPIE 10827, Sixth International Conference on Optical and Photonic Engineering, 31/12/18. https://doi.org/10.1117/12.2500785.short?SSO=1

TY - GEN

T1 - The study of nano-structure on in-situ UV laser irradiating GaAs(001) substrate

AU - Peng, Changsi

AU - Yang, Linyun

AU - Miao, Lili

AU - Yang, Xinning

PY - 2018/12/31

Y1 - 2018/12/31

N2 - The AFM study of a series of novel nano-structure on in-situ laser irradiating GaAs(001) substrate in molecular beam epitaxy was presented. Nano-hole, nano-island and nano-ring(Chinese ancient copper coin shape) were observed after laser irradiating. The desorption of Gallium on GaAs surface varies according to different power energy and pulse numbers, leading to the formation of nano-holes, nano-islands and nano-rings. It is speculated that these nanostructures are galliumrich through the change of the RHEED stripe. What’s more, the desorption of defectless GaAs sub-monolayer was discovered, and matched dynamic evolution model (self-drilling effect dominated by Ga atom) was presented. The dependence of the temperature on the surface of the substrate with time was studied after laser irradiating according to the heat conduction equation. The drastic temperature changes caused non-thermodynamic equilibrium process which makes these morphologies.

AB - The AFM study of a series of novel nano-structure on in-situ laser irradiating GaAs(001) substrate in molecular beam epitaxy was presented. Nano-hole, nano-island and nano-ring(Chinese ancient copper coin shape) were observed after laser irradiating. The desorption of Gallium on GaAs surface varies according to different power energy and pulse numbers, leading to the formation of nano-holes, nano-islands and nano-rings. It is speculated that these nanostructures are galliumrich through the change of the RHEED stripe. What’s more, the desorption of defectless GaAs sub-monolayer was discovered, and matched dynamic evolution model (self-drilling effect dominated by Ga atom) was presented. The dependence of the temperature on the surface of the substrate with time was studied after laser irradiating according to the heat conduction equation. The drastic temperature changes caused non-thermodynamic equilibrium process which makes these morphologies.

KW - in situ laser irradiation

U2 - 10.1117/12.2500785.short?SSO=1

DO - 10.1117/12.2500785.short?SSO=1

M3 - Conference contribution

BT - Proceedings Volume 10827, Sixth International Conference on Optical and Photonic Engineering (icOPEN 2018)

PB - SPIE

T2 - SPIE 10827, Sixth International Conference on Optical and Photonic Engineering

Y2 - 31 December 2018

ER -

The study of nano-structure on in-situ UV laser irradiating GaAs(001) substrate

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