Abstract
Tapping atomic force microscope (TM-AFM) can measure soft samples, which has the advantages of low loss and high resolution, and has been widely used in the characterization of soft micro-nano materials by atomic force microscope (AFM). The phase image in TM-AFM contains sample properties, and it is an important method to characterize the sample by TM-AFM. At present, researchers usually select the frequency near the first resonance peak of the probe to drive its vibration to carry out scanning imaging. However, the phase sensitivity near the first-order resonance of the probe is not high. Therefore, the phase image of TM-AFM is also less sensitive to characterize micro-nano materials. In order to improve the phase sensitivity of the probe, the probe working at the phase resonance peak was selected in this paper to improve the phase sensitivity of the probe vibration and the imaging quality of TM-AFM phase image. The experimental results show that the phase image of phase resonance-atomic force microscope (PR-AFM) can provide not only the surface information but also the structure information of the sample subsurface. PR-AFM can be applied for better characterization of micro and nano materials.
| Original language | English |
|---|---|
| Title of host publication | 2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2021 - Proceedings |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 47-50 |
| Number of pages | 4 |
| ISBN (Electronic) | 9781665448819 |
| ISBN (Print) | 9781665448826 |
| DOIs | |
| Publication status | Published - 17 Nov 2021 |
| Event | 2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Xi'an, China Duration: 2 Aug 2021 → 6 Aug 2021 http://3m-nano.org/2021/main/index.asp |
Publication series
| Name | 2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2021 - Proceedings |
|---|
Conference
| Conference | 2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) |
|---|---|
| City | Xi'an, China |
| Period | 2/08/21 → 6/08/21 |
| Other | 2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) (02/08/2021-06/08/2021, Xi'an, China) |
| Internet address |
Keywords
- PR-AFM
- TM-AFM phase image
- atomic force acoustic microscopy
- first-order resonance
- imaging quality
- phase resonance peak
- phase resonance-atomic force microscope
- phase sensitivity
- probe vibration
- sample properties
- scanning imaging
- soft micronanomaterials
- soft samples
- Phase image
- Soft sample
- TM-AFM
ASJC Scopus subject areas
- Industrial and Manufacturing Engineering
- Electronic, Optical and Magnetic Materials
- Metals and Alloys
- Polymers and Plastics
- Surfaces, Coatings and Films
- Control and Optimization
- Instrumentation
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