Tailoring 2D and 3D interference structures via multi-parameter control in a 3+1 beam laser interference system

Amir Hamza; Li Li; Zuobin Wang; Dayou Li

doi:10.1109/3M-NANO65639.2025.11261020

Tailoring 2D and 3D interference structures via multi-parameter control in a 3+1 beam laser interference system

Amir Hamza
, Li Li
, Zuobin Wang
, Dayou Li

Changchun University of Science and Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Achieving precise 3D geometric control in Laser Interference Lithography (LIL) is vital. This study simulates a 3+1 beam LIL system, exploring how wave vector, polarization, and phase modulation impact 2D/3D pattern symmetry and morphology. We found phase shifts translate patterns, polarization rotation reshapes motifs, and wave vector changes alter lattice symmetry. Thus, wave vector governs periodicity/symmetry, polarization controls morphology, and phase tunes position. This decoupled parameter control in 3+1 LIL allows fabrication of programmable structures for advanced photonics and materials.

Original language	English
Title of host publication	2025 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2025 - Conference Proceedings
Editors	Miao Yu, Yi Zeng, Bowei Wang, Junxi Wang, Hao Wu, Dongxu Wang, Zhengxun Song, Zuobin Wang
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	471-475
Number of pages	5
ISBN (Electronic)	9798331543679
ISBN (Print)	9798331543686
DOIs	https://doi.org/10.1109/3M-NANO65639.2025.11261020
Publication status	Published - 2 Dec 2025
Event	2025 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2025 - Changchun, China Duration: 28 Jul 2025 → 1 Aug 2025

Publication series

Name	2025 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2025 - Conference Proceedings

Conference

Conference	2025 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2025
Country/Territory	China
City	Changchun
Period	28/07/25 → 1/08/25

Keywords

Fabrication
Laser Interference Lithography
Multiparameter Modulation

ASJC Scopus subject areas

Biotechnology
Electrical and Electronic Engineering
Industrial and Manufacturing Engineering
Electronic, Optical and Magnetic Materials
Instrumentation

Access to Document

10.1109/3M-NANO65639.2025.11261020

https://ieeexplore.ieee.org/document/11261020

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Cite this

Hamza, A., Li, L., Wang, Z., & Li, D. (2025). Tailoring 2D and 3D interference structures via multi-parameter control in a 3+1 beam laser interference system. In M. Yu, Y. Zeng, B. Wang, J. Wang, H. Wu, D. Wang, Z. Song, & Z. Wang (Eds.), 2025 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2025 - Conference Proceedings (pp. 471-475). (2025 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2025 - Conference Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/3M-NANO65639.2025.11261020

Hamza, Amir ; Li, Li ; Wang, Zuobin et al. / Tailoring 2D and 3D interference structures via multi-parameter control in a 3+1 beam laser interference system. 2025 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2025 - Conference Proceedings. editor / Miao Yu ; Yi Zeng ; Bowei Wang ; Junxi Wang ; Hao Wu ; Dongxu Wang ; Zhengxun Song ; Zuobin Wang. Institute of Electrical and Electronics Engineers Inc., 2025. pp. 471-475 (2025 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2025 - Conference Proceedings).

@inproceedings{a7ec54786f9b4e16a65979844306a651,

title = "Tailoring 2D and 3D interference structures via multi-parameter control in a 3+1 beam laser interference system",

abstract = "Achieving precise 3D geometric control in Laser Interference Lithography (LIL) is vital. This study simulates a 3+1 beam LIL system, exploring how wave vector, polarization, and phase modulation impact 2D/3D pattern symmetry and morphology. We found phase shifts translate patterns, polarization rotation reshapes motifs, and wave vector changes alter lattice symmetry. Thus, wave vector governs periodicity/symmetry, polarization controls morphology, and phase tunes position. This decoupled parameter control in 3+1 LIL allows fabrication of programmable structures for advanced photonics and materials.",

keywords = "Fabrication, Laser Interference Lithography, Multiparameter Modulation",

author = "Amir Hamza and Li Li and Zuobin Wang and Dayou Li",

note = "Publisher Copyright: {\textcopyright} 2025 IEEE.; 2025 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2025 ; Conference date: 28-07-2025 Through 01-08-2025",

year = "2025",

month = dec,

day = "2",

doi = "10.1109/3M-NANO65639.2025.11261020",

language = "English",

isbn = "9798331543686",

series = "2025 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2025 - Conference Proceedings",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "471--475",

editor = "Miao Yu and Yi Zeng and Bowei Wang and Junxi Wang and Hao Wu and Dongxu Wang and Zhengxun Song and Zuobin Wang",

booktitle = "2025 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2025 - Conference Proceedings",

address = "United States",

}

Hamza, A, Li, L, Wang, Z & Li, D 2025, Tailoring 2D and 3D interference structures via multi-parameter control in a 3+1 beam laser interference system. in M Yu, Y Zeng, B Wang, J Wang, H Wu, D Wang, Z Song & Z Wang (eds), 2025 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2025 - Conference Proceedings. 2025 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2025 - Conference Proceedings, Institute of Electrical and Electronics Engineers Inc., pp. 471-475, 2025 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2025, Changchun, China, 28/07/25. https://doi.org/10.1109/3M-NANO65639.2025.11261020

Tailoring 2D and 3D interference structures via multi-parameter control in a 3+1 beam laser interference system. / Hamza, Amir; Li, Li; Wang, Zuobin et al.
2025 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2025 - Conference Proceedings. ed. / Miao Yu; Yi Zeng; Bowei Wang; Junxi Wang; Hao Wu; Dongxu Wang; Zhengxun Song; Zuobin Wang. Institute of Electrical and Electronics Engineers Inc., 2025. p. 471-475 (2025 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2025 - Conference Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Tailoring 2D and 3D interference structures via multi-parameter control in a 3+1 beam laser interference system

AU - Hamza, Amir

AU - Li, Li

AU - Wang, Zuobin

AU - Li, Dayou

PY - 2025/12/2

Y1 - 2025/12/2

N2 - Achieving precise 3D geometric control in Laser Interference Lithography (LIL) is vital. This study simulates a 3+1 beam LIL system, exploring how wave vector, polarization, and phase modulation impact 2D/3D pattern symmetry and morphology. We found phase shifts translate patterns, polarization rotation reshapes motifs, and wave vector changes alter lattice symmetry. Thus, wave vector governs periodicity/symmetry, polarization controls morphology, and phase tunes position. This decoupled parameter control in 3+1 LIL allows fabrication of programmable structures for advanced photonics and materials.

AB - Achieving precise 3D geometric control in Laser Interference Lithography (LIL) is vital. This study simulates a 3+1 beam LIL system, exploring how wave vector, polarization, and phase modulation impact 2D/3D pattern symmetry and morphology. We found phase shifts translate patterns, polarization rotation reshapes motifs, and wave vector changes alter lattice symmetry. Thus, wave vector governs periodicity/symmetry, polarization controls morphology, and phase tunes position. This decoupled parameter control in 3+1 LIL allows fabrication of programmable structures for advanced photonics and materials.

KW - Fabrication

KW - Laser Interference Lithography

KW - Multiparameter Modulation

UR - https://www.scopus.com/pages/publications/105030499845

U2 - 10.1109/3M-NANO65639.2025.11261020

DO - 10.1109/3M-NANO65639.2025.11261020

M3 - Conference contribution

AN - SCOPUS:105030499845

SN - 9798331543686

T3 - 2025 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2025 - Conference Proceedings

SP - 471

EP - 475

BT - 2025 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2025 - Conference Proceedings

A2 - Yu, Miao

A2 - Zeng, Yi

A2 - Wang, Bowei

A2 - Wang, Junxi

A2 - Wu, Hao

A2 - Wang, Dongxu

A2 - Song, Zhengxun

A2 - Wang, Zuobin

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2025 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2025

Y2 - 28 July 2025 through 1 August 2025

ER -

Hamza A, Li L, Wang Z, Li D. Tailoring 2D and 3D interference structures via multi-parameter control in a 3+1 beam laser interference system. In Yu M, Zeng Y, Wang B, Wang J, Wu H, Wang D, Song Z, Wang Z, editors, 2025 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2025 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc. 2025. p. 471-475. (2025 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2025 - Conference Proceedings). doi: 10.1109/3M-NANO65639.2025.11261020

Tailoring 2D and 3D interference structures via multi-parameter control in a 3+1 beam laser interference system

Abstract

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Keywords

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