@inproceedings{29f9a0186ef14692a227736683f60d7e,
title = "Periodic silicon metasurfaces for high performance structural color",
abstract = "Structural color can be divided into plasmonic structural color and all-dielectric structural color, and dielectric structural color is becoming the first choice for making structural color because of its high color saturation and low cost. In this work, a large area of silicon-based structural color was fabricated using the Taber effect based on laser interference theory from commercial silicon-on-insulator (SOI) substrates on the basis of FDTD simulation. Consequently, periodic grating silicon metasurfaces with a width of 106 nm can achieve a maximum spectral reflectance of up to 91\% at 650-700 nm, which can produce bright red structural color, providing a reliable way for the fabrication of low cost and high performance dielectric structural color at low cost.",
keywords = "all-dielectric material, metasurface, structural color",
author = "Zhihui Ma and Lu Wang and Zhongliang Qiao and Litong Dong and Mengnan Liu and Fayomi, \{Ojo S.\} and Liguo Tian and Dayou Li and Yujuan Chen",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 2024 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) ; Conference date: 29-07-2024 Through 02-08-2024",
year = "2024",
month = dec,
day = "3",
doi = "10.1109/3m-nano61605.2024.10769677",
language = "English",
isbn = "9798350362107",
series = "2024 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2024",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "605--609",
editor = "Ying Wang and Yuxiao Cui and Jingran Zhang and Miao Yu and Hao Wu and Zuobin Wang",
booktitle = "2024 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2024",
address = "United States",
}