Abstract
The wide application of metal nanoparticle arrays has attracted much attention in the field of nanotechnology. Such as quantum dots, structural colors, sensors, metamaterials. In this work, we fabricated periodic micro-and nanostructures through the interference of two beams with the same frequency and vibration direction. By controlling the spot energy and light field energy distribution of Gaussian interference lithography, the various surface characteristics of Ag-Si material system (Ag@Si) are optimized, and the mass transfer brought by Oswald ripening is used to control the Rayleigh instability in the thermal dewetting process. To achieve the purpose of the periodic gradient Ag nanoparticle arrays (AgNPs) pattern can be controlled. The experimental results show that the periodic micro-and nanostructures can be obtained by optimizing the spot energy and the number of pulses.
| Original language | English |
|---|---|
| Title of host publication | 2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2021 - Proceedings |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 164-167 |
| Number of pages | 4 |
| ISBN (Electronic) | 9781665448819 |
| ISBN (Print) | 9781665448826 |
| DOIs | |
| Publication status | Published - 17 Nov 2021 |
| Event | 2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Xi'an, China Duration: 2 Aug 2021 → 6 Aug 2021 http://3m-nano.org/2021/main/index.asp |
Publication series
| Name | 2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2021 - Proceedings |
|---|
Conference
| Conference | 2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) |
|---|---|
| City | Xi'an, China |
| Period | 2/08/21 → 6/08/21 |
| Other | 2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) (02/08/2021-06/08/2021, Xi'an, China) |
| Internet address |
Keywords
- Laser interference lithography
- Oswald ripening
- periodic micro-and nanosturctures
- laser interference lithography
ASJC Scopus subject areas
- Industrial and Manufacturing Engineering
- Electronic, Optical and Magnetic Materials
- Metals and Alloys
- Polymers and Plastics
- Surfaces, Coatings and Films
- Control and Optimization
- Instrumentation
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