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Interference system for high pressure environment

  • Tero Kumpulainen
  • , Amandeep Singh
  • , Thomas März
  • , Litong Dong
  • , Jarno Reuna
  • , Jorma Vihinen
  • , Dayou Li
  • , Erkki Levänen
  • Tampere University
  • InnoLas Laser GmbH

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)
1 Downloads (Pure)

Abstract

Laser interference patterning or lithography has been used in variety of the applications using, patterning, masking and processing structures at top of material. It offers fast processing over as large areas can be processed simultaneously. Additionally, fine patterns are possible to achieve both in micro and sub-micro scale. In this manuscript is presented novel concept to combine interference patterning and high-pressure processing environment. With aid of high-pressure system, it is possible to control processing environment and add co-solvents in desired state (liquid, gas, supercritical) and use developed system as controlled reactive environment in the future studies. Two systems were developed and assembled for testing and proofing the concept. The results of the two 4-beam interference systems (lens- and mirror-based) are presented and compared.
Original languageEnglish
Article number107278
JournalOptics and Laser Technology
Volume142
Issue number107278
DOIs
Publication statusPublished - 29 May 2021

Keywords

  • High pressure CO2
  • Laser Interference patterning
  • Laser material processing
  • Supercritical fluid
  • High pressure CO

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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