Fast Fourier transport analysis of surface structures fabricated by laser interference lithography

Mengnan Liu; Litong Dong; Ziang Zhang; Li Li; Lu Wang; Zhengxun Song; Zhankun Weng; Xueyan Han; Linhua Zhou; Zuobin Wang

doi:10.7567/1882-0786/ab37ae

Fast Fourier transport analysis of surface structures fabricated by laser interference lithography

Mengnan Liu
, Litong Dong
, Ziang Zhang
, Li Li
, Lu Wang
, Zhengxun Song
, Zhankun Weng
, Xueyan Han
, Linhua Zhou
, Zuobin Wang

Changchun University of Science and Technology

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

1 Downloads (Pure)

Abstract

This paper presents an FFT (fast Fourier transform) analytical method for the study of surface structures fabricated by laser interference lithography (LIL). In the work, the FFT analytical method combined with Gaussian fitting is used to determine the periods and pattern distributions of surface structures from frequency spectra. For LIL, the processing parameters of incident and azimuth angles can be obtained corresponding to the period and pattern distribution. This work facilitates the detection of micro- and nano-structures, the analysis of pattern distribution in engineering, and the processing error analysis of LIL.

Original language	English
Pages (from-to)	096503
Journal	Applied Physics Express
Volume	12
Issue number	9
DOIs	https://doi.org/10.7567/1882-0786/ab37ae
Publication status	Published - 14 Aug 2019

Keywords

Laser interference lithography
Techniques, Measurements and Systems

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10.7567/1882-0786/ab37ae

APEXab37aep5Accepted author manuscript, 1.63 MBLicence: CC BY-NC-ND

https://iopscience.iop.org/article/10.7567/1882-0786/ab37ae

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title = "Fast Fourier transport analysis of surface structures fabricated by laser interference lithography",

abstract = "This paper presents an FFT (fast Fourier transform) analytical method for the study of surface structures fabricated by laser interference lithography (LIL). In the work, the FFT analytical method combined with Gaussian fitting is used to determine the periods and pattern distributions of surface structures from frequency spectra. For LIL, the processing parameters of incident and azimuth angles can be obtained corresponding to the period and pattern distribution. This work facilitates the detection of micro- and nano-structures, the analysis of pattern distribution in engineering, and the processing error analysis of LIL.",

keywords = "Laser interference lithography, Techniques, Measurements and Systems",

author = "Mengnan Liu and Litong Dong and Ziang Zhang and Li Li and Lu Wang and Zhengxun Song and Zhankun Weng and Xueyan Han and Linhua Zhou and Zuobin Wang",

year = "2019",

month = aug,

day = "14",

doi = "10.7567/1882-0786/ab37ae",

language = "English",

volume = "12",

pages = "096503",

journal = "Applied Physics Express",

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publisher = "Japan Society of Applied Physics",

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TY - JOUR

T1 - Fast Fourier transport analysis of surface structures fabricated by laser interference lithography

AU - Liu, Mengnan

AU - Dong, Litong

AU - Zhang, Ziang

AU - Li, Li

AU - Wang, Lu

AU - Song, Zhengxun

AU - Weng, Zhankun

AU - Han, Xueyan

AU - Zhou, Linhua

AU - Wang, Zuobin

PY - 2019/8/14

Y1 - 2019/8/14

N2 - This paper presents an FFT (fast Fourier transform) analytical method for the study of surface structures fabricated by laser interference lithography (LIL). In the work, the FFT analytical method combined with Gaussian fitting is used to determine the periods and pattern distributions of surface structures from frequency spectra. For LIL, the processing parameters of incident and azimuth angles can be obtained corresponding to the period and pattern distribution. This work facilitates the detection of micro- and nano-structures, the analysis of pattern distribution in engineering, and the processing error analysis of LIL.

AB - This paper presents an FFT (fast Fourier transform) analytical method for the study of surface structures fabricated by laser interference lithography (LIL). In the work, the FFT analytical method combined with Gaussian fitting is used to determine the periods and pattern distributions of surface structures from frequency spectra. For LIL, the processing parameters of incident and azimuth angles can be obtained corresponding to the period and pattern distribution. This work facilitates the detection of micro- and nano-structures, the analysis of pattern distribution in engineering, and the processing error analysis of LIL.

KW - Laser interference lithography

KW - Techniques, Measurements and Systems

U2 - 10.7567/1882-0786/ab37ae

DO - 10.7567/1882-0786/ab37ae

M3 - Article

SN - 1882-0778

VL - 12

SP - 096503

JO - Applied Physics Express

JF - Applied Physics Express

IS - 9

ER -

Fast Fourier transport analysis of surface structures fabricated by laser interference lithography

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