Fabrication of TiO2 nanowire arrays using laser interference lithography aided hydrothermal method

Xiao-Hui Ning; Qing-Ling Meng; Li Li; Yong-Lu Han; Dong-Yang Zhou; Liang Cao; Zhankun Weng; Ran Ding; Zuobin Wang

doi:10.1109/3M-NANO.2017.8286336

Fabrication of TiO2 nanowire arrays using laser interference lithography aided hydrothermal method

Xiao-Hui Ning
, Qing-Ling Meng
, Li Li
, Yong-Lu Han
, Dong-Yang Zhou
, Liang Cao
, Zhankun Weng
, Ran Ding
, Zuobin Wang

Institute for Research in Applicable Computing (IRAC)

Changchun University of Science and Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Titanium dioxide (TÍO 2 ) is one of the most widely investigated semiconductor materials because of its unique properties. TiO 2 nanowire arrays can be synthesized through a two-step method, the fluorine-doped tin oxide (FTO) substrates were ablated using laser interference lithography technology, and TiO 2 nanowire arrays grown on the patterned FTO substrates. The TiO 2 nanowire arrays were characterized by SEM and XRD measurements. This work provides a high efficient method for the fabrication of ordered TiO 2 nanowire arrays for different applications in highly functionalized assemblies and composites.

Original language	English
Title of host publication	nan
Publisher	Institute of Electrical and Electronics Engineers Inc.
DOIs	https://doi.org/10.1109/3M-NANO.2017.8286336
Publication status	Published - 8 Feb 2018
Event	2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) - Shanghai Duration: 7 Aug 2017 → 11 Aug 2017

Conference

Conference	2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)
City	Shanghai
Period	7/08/17 → 11/08/17
Other	2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) (07/08/2017-11/08/2017, Shanghai)

Keywords

Laser interference lithography

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10.1109/3M-NANO.2017.8286336

https://ieeexplore.ieee.org/document/8286336/

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@inproceedings{352b0478c6af4c889548ead0db18e3a5,

title = "Fabrication of TiO2 nanowire arrays using laser interference lithography aided hydrothermal method",

abstract = "Titanium dioxide (T{\'I}O 2 ) is one of the most widely investigated semiconductor materials because of its unique properties. TiO 2 nanowire arrays can be synthesized through a two-step method, the fluorine-doped tin oxide (FTO) substrates were ablated using laser interference lithography technology, and TiO 2 nanowire arrays grown on the patterned FTO substrates. The TiO 2 nanowire arrays were characterized by SEM and XRD measurements. This work provides a high efficient method for the fabrication of ordered TiO 2 nanowire arrays for different applications in highly functionalized assemblies and composites.",

keywords = "Laser interference lithography",

author = "Xiao-Hui Ning and Qing-Ling Meng and Li Li and Yong-Lu Han and Dong-Yang Zhou and Liang Cao and Zhankun Weng and Ran Ding and Zuobin Wang",

year = "2018",

month = feb,

day = "8",

doi = "10.1109/3M-NANO.2017.8286336",

language = "English",

booktitle = "nan",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

address = "United States",

note = "2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) ; Conference date: 07-08-2017 Through 11-08-2017",

}

Ning, X-H, Meng, Q-L, Li, L, Han, Y-L, Zhou, D-Y, Cao, L, Weng, Z, Ding, R & Wang, Z 2018, Fabrication of TiO2 nanowire arrays using laser interference lithography aided hydrothermal method. in nan. Institute of Electrical and Electronics Engineers Inc., 2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), Shanghai, 7/08/17. https://doi.org/10.1109/3M-NANO.2017.8286336

TY - GEN

T1 - Fabrication of TiO2 nanowire arrays using laser interference lithography aided hydrothermal method

AU - Ning, Xiao-Hui

AU - Meng, Qing-Ling

AU - Li, Li

AU - Han, Yong-Lu

AU - Zhou, Dong-Yang

AU - Cao, Liang

AU - Weng, Zhankun

AU - Ding, Ran

AU - Wang, Zuobin

PY - 2018/2/8

Y1 - 2018/2/8

N2 - Titanium dioxide (TÍO 2 ) is one of the most widely investigated semiconductor materials because of its unique properties. TiO 2 nanowire arrays can be synthesized through a two-step method, the fluorine-doped tin oxide (FTO) substrates were ablated using laser interference lithography technology, and TiO 2 nanowire arrays grown on the patterned FTO substrates. The TiO 2 nanowire arrays were characterized by SEM and XRD measurements. This work provides a high efficient method for the fabrication of ordered TiO 2 nanowire arrays for different applications in highly functionalized assemblies and composites.

AB - Titanium dioxide (TÍO 2 ) is one of the most widely investigated semiconductor materials because of its unique properties. TiO 2 nanowire arrays can be synthesized through a two-step method, the fluorine-doped tin oxide (FTO) substrates were ablated using laser interference lithography technology, and TiO 2 nanowire arrays grown on the patterned FTO substrates. The TiO 2 nanowire arrays were characterized by SEM and XRD measurements. This work provides a high efficient method for the fabrication of ordered TiO 2 nanowire arrays for different applications in highly functionalized assemblies and composites.

KW - Laser interference lithography

U2 - 10.1109/3M-NANO.2017.8286336

DO - 10.1109/3M-NANO.2017.8286336

M3 - Conference contribution

BT - nan

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

Y2 - 7 August 2017 through 11 August 2017

ER -

Fabrication of TiO2 nanowire arrays using laser interference lithography aided hydrothermal method

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