@inproceedings{cf53764504b348c398e48856b56e6e0b,
title = "3+1 beam laser interference lithography for preparing 3D nanostructures",
abstract = "Targeting the demand for three-dimensional (3D) micro/nanostructure fabrication, we systematically investigate the optical field formation mechanism in non-coplanar 3+1 beams interference. It specifically elucidates the governing role of the coherent beams' incidence angle in controlling the aspect ratio of the interference patterns. Based on this theoretical framework, the 3+1 beam laser interference lithography system was constructed for studying the 3D periodic nanostructures.",
keywords = "3+1 beam laser interference lithography, 3D periodic nanostructures, aspect ratio, incidence angle",
author = "Xiaokun Liang and Litong Dong and Mengnan Liu and Dayou Li and Zuobin Wang",
note = "Publisher Copyright: {\textcopyright} 2025 IEEE.; 2025 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2025 ; Conference date: 28-07-2025 Through 01-08-2025",
year = "2025",
month = dec,
day = "2",
doi = "10.1109/3M-NANO65639.2025.11261040",
language = "English",
isbn = "9798331543686",
series = "2025 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2025 - Conference Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "46--49",
editor = "Miao Yu and Yi Zeng and Bowei Wang and Junxi Wang and Hao Wu and Dongxu Wang and Zhengxun Song and Zuobin Wang",
booktitle = "2025 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2025 - Conference Proceedings",
address = "United States",
}